China
Research Article
Optical Multi-ring Cascade Cavity Temperature Sensor with Ultra-High Sensitivity
Author(s): Shen San-min, Deng Jia-hao and Yan Shu-binShen San-min, Deng Jia-hao and Yan Shu-bin
An ultra-small integrated photonic ten-order resonators temperature sensor has been proposed and demonstrated and fabrication using well-developed MEMS technologies incorporates a silicon ring resonator. The temperature variation is measured by monitoring the shift in the ten-order resonant wavelength of the silicon resonator, which was induced by the thermo-optic effect and the thermal expansion effect. The best achieved sensitivity is about 130 pm/°C for a waveguide width of 450 nm, and the radius of the micro ring is about 5 μm. Meanwhile, the two-channel sensor based on double racetrack rings is also reported.
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DOI:
10.4172/2090-4886.1000155
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